Granted Patent
Utility
US 6,512,391 · App. 10/179,771
Probe station thermal chuck with shielding for capacitive current
Inventors:
Clarence E. Cowan, Paul A. Tervo, John Dunklee
Patented Case
View Patent ↗
Granted: Jan 28, 2003
Filed: Jun 24, 2002
Inventors
Clarence E. Cowan
Paul A. Tervo
John Dunklee
Assignee (at issue)
Cascade Microtech, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.