Granted Patent
Utility
US 6,513,380 · App. 09/884,880
MEMS sensor with single central anchor and motion-limiting connection geometry
Inventors:
John Reeds, Ying Hsu, Phu Cu Dao
Patented Case
View Patent ↗
Granted: Feb 4, 2003
Filed: Jun 19, 2001
Inventors
John Reeds
Ying Hsu
Phu Cu Dao
Assignee (at issue)
Microsensors Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.