Granted Patent
Utility
US 6,514,864 · App. 09/854,578
Fabrication method for semiconductor integrated circuit device
Inventors:
Shinichi Nakabayashi, Hisahiko Abe, Katsuhiro Ota
Patented Case
View Patent ↗
Granted: Feb 4, 2003
Filed: May 15, 2001
Inventors
Shinichi Nakabayashi
Hisahiko Abe
Katsuhiro Ota
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.