Granted Patent
Utility
US 6,514,869 · App. 09/924,538
Method for use in manufacturing a semiconductor device
Inventors:
Tetsuya Wada, Toshimitsu Miyata, Eisuke Nishitani
Patented Case
View Patent ↗
Granted: Feb 4, 2003
Filed: Aug 9, 2001
Inventors
Tetsuya Wada
Toshimitsu Miyata
Eisuke Nishitani
Assignee (at issue)
Hitachi Kokusai Electric Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.