Granted Patent
Utility
US 6,514,873 · App. 09/688,196
Method for fabricating semiconductor device
Inventors:
Hideo Nakagawa, Eiji Tamaoka
Patented Case
View Patent ↗
Granted: Feb 4, 2003
Filed: Oct 16, 2000
Inventors
Hideo Nakagawa
Eiji Tamaoka
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.