Granted Patent
Utility
US 6,515,264 · App. 10/170,539
Heater
Inventors:
Eiichi Toya, Tomio Konn, Tomohiro Nagata, Norihiko Saito, Shigeru Yamamura, Ken Nakao, Takanori Saito, Hisaei Osanai, Toshiyuki Makiya
Patented Case
View Patent ↗
Granted: Feb 4, 2003
Filed: Jun 14, 2002
Inventors
Eiichi Toya
Tomio Konn
Tomohiro Nagata
Norihiko Saito
Shigeru Yamamura
Ken Nakao
Takanori Saito
Hisaei Osanai
Toshiyuki Makiya
Assignees (at issue)
Toshiba Ceramics Co., Ltd.
Tokyo Electron Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.