IP Library Granted Patent US 6,517,422
Granted Patent Utility
US 6,517,422 · App. 09/798,980

Polishing apparatus and method thereof

Inventors: Takao Sakamoto, Shinya Kawamoto, Katsuaki Kotari, Katsuyoshi Kojima, Masayoshi Saitou, Yoshihiko Hoshi
Patented Case View Patent ↗
Granted: Feb 11, 2003 Filed: Mar 6, 2001
Inventors
Takao Sakamoto
Shinya Kawamoto
Katsuaki Kotari
Katsuyoshi Kojima
Masayoshi Saitou
Yoshihiko Hoshi
Assignee (at issue)
Toshiba Ceramics Co., Ltd.

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Quick Facts
Patent No.
US 6,517,422
App. No.
09/798,980
Filed
2001-03-06
Granted
2003-02-11
Kind
B2