IP Library Granted Patent US 6,517,608
Granted Patent Utility
US 6,517,608 · App. 10/187,342

Process and apparatus for removing particles from high purity gas systems

Inventors: Wayne Thomas McDermott, Richard Carl Ockovic
Patented Case View Patent ↗
Granted: Feb 11, 2003 Filed: Jun 28, 2002
Inventors
Wayne Thomas McDermott
Richard Carl Ockovic
Assignee (at issue)
Air Products and Chemicals, Inc.

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Quick Facts
Patent No.
US 6,517,608
App. No.
10/187,342
Filed
2002-06-28
Granted
2003-02-11
Kind
B2