Granted Patent
Utility
US 6,517,616 · App. 10/012,668
Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide
Inventors:
Eugene P. Marsh, Stefan Uhlenbrock
Patented Case
View Patent ↗
Granted: Feb 11, 2003
Filed: Oct 30, 2001
Inventors
Eugene P. Marsh
Stefan Uhlenbrock
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.