IP Library Granted Patent US 6,517,632
Granted Patent Utility
US 6,517,632 · App. 09/760,713

Method of fabricating a single crystal ingot and method of fabricating a silicon wafer

Inventors: Toshirou Minami, Yumiko Hirano, Kouki Ikeuchi, Takashi Miyahara, Takashi Ishikawa, Osamu Kubota, Akihiko Kobayashi
Patented Case View Patent ↗
Granted: Feb 11, 2003 Filed: Jan 17, 2001
Inventors
Toshirou Minami
Yumiko Hirano
Kouki Ikeuchi
Takashi Miyahara
Takashi Ishikawa
Osamu Kubota
Akihiko Kobayashi
Assignee (at issue)
Toshiba Ceramics Co., Ltd.

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Quick Facts
Patent No.
US 6,517,632
App. No.
09/760,713
Filed
2001-01-17
Granted
2003-02-11
Kind
B2