Granted Patent
Utility
US 6,517,641 · App. 09/855,561
Apparatus and process for collecting trace metals from wafers
Inventor:
Douglas Fernandez
Patented Case
View Patent ↗
Granted: Feb 11, 2003
Filed: May 16, 2001
Inventor
Douglas Fernandez
Assignee (at issue)
Infineon Technologies Richmond, LP
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.