Granted Patent
Utility
US 6,518,080 · App. 09/992,965
Method of fabricating low dark current photodiode arrays
Inventors:
Jonas Bentell, Michael Lange
Patented Case
View Patent ↗
Granted: Feb 11, 2003
Filed: Nov 14, 2001
Inventors
Jonas Bentell
Michael Lange
Assignee (at issue)
Sensors Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.