IP Library Granted Patent US 6,518,547
Granted Patent Utility
US 6,518,547 · App. 09/788,086

Heat treatment apparatus

Inventors: Mitsukazu Takahashi, Hideo Nishihara, Yoshio Ito
Patented Case View Patent ↗
Granted: Feb 11, 2003 Filed: Feb 16, 2001
Inventors
Mitsukazu Takahashi
Hideo Nishihara
Yoshio Ito
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.

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Quick Facts
Patent No.
US 6,518,547
App. No.
09/788,086
Filed
2001-02-16
Granted
2003-02-11
Kind
B2