Granted Patent
Utility
US 6,520,191 · App. 09/807,907
Carrier for cleaning silicon wafers
Inventors:
Yoshio Iwamoto, Hiroyuki Kurokawa
Patented Case
View Patent ↗
Granted: Feb 18, 2003
Filed: Jun 8, 2001
Inventors
Yoshio Iwamoto
Hiroyuki Kurokawa
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.