Granted Patent
Utility
US 6,520,338 · App. 09/835,941
Wafer carrier having a low tolerance build-up
Inventors:
Gregory Bores, Michael C. Zabka
Patented Case
View Patent ↗
Granted: Feb 18, 2003
Filed: Apr 16, 2001
Inventors
Gregory Bores
Michael C. Zabka
Assignee (at issue)
ENTEGRIS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.