IP Library Granted Patent US 6,520,726
Granted Patent Utility
US 6,520,726 · App. 09/517,377

Apparatus and method for using a robot to remove a substrate carrier door

Inventors: Gregory Steven Cook, Craig Chidlow, Rodney C. Ow, Lang Van Nugyen, J. Rafael Gomez, Steve Reyling, Martin Peter Aalund, Steven Remis
Patented Case View Patent ↗
Granted: Feb 18, 2003 Filed: Mar 2, 2000
Inventors
Gregory Steven Cook
Craig Chidlow
Rodney C. Ow
Lang Van Nugyen
J. Rafael Gomez
Steve Reyling
Martin Peter Aalund
Steven Remis
Assignee (at issue)
PRI Automation, Inc.

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Quick Facts
Patent No.
US 6,520,726
App. No.
09/517,377
Filed
2000-03-02
Granted
2003-02-18
Kind
B1