Granted Patent
Utility
US 6,521,048 · App. 09/757,542
Single body injector and deposition chamber
Inventors:
Adam Q. Miller, Daniel Dobkin
Patented Case
View Patent ↗
Granted: Feb 18, 2003
Filed: Jan 9, 2001
Inventors
Adam Q. Miller
Daniel Dobkin
Assignee (at issue)
ASML US, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.