Granted Patent
Utility
US 6,521,049 · App. 09/327,152
Method for reducing gaseous species of contamination in wet processes
Inventor:
J. Brett Rolfson
Patented Case
View Patent ↗
Granted: Feb 18, 2003
Filed: Jun 7, 1999
Inventor
J. Brett Rolfson
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.