Granted Patent
Utility
US 6,521,100 · App. 09/776,170
Method of producing a piezoelectric thin film and bulk acoustic wave resonator fabricated according to the method
Inventors:
Jyrki Molarius, Markku Ylilammi
Patented Case
View Patent ↗
Granted: Feb 18, 2003
Filed: Feb 2, 2001
Inventors
Jyrki Molarius
Markku Ylilammi
Assignee (at issue)
Nokia Mobile Phones Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.