Granted Patent
Utility
US 6,522,406 · App. 09/877,363
Correcting the system polarization sensitivity of a metrology tool having a rotatable polarizer
Inventors:
Pablo I. Rovira, Richard A. Yarussi, James M. Holden, Roger R. Lowe-Webb
Patented Case
View Patent ↗
Granted: Feb 18, 2003
Filed: Jun 7, 2001
Inventors
Pablo I. Rovira
Richard A. Yarussi
James M. Holden
Roger R. Lowe-Webb
Assignee (at issue)
Nanometrics Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.