Granted Patent
Utility
US 6,524,461 · App. 09/823,749
Electrodeposition of metals in small recesses using modulated electric fields
Inventors:
E. Jennings Taylor, Jenny J. Sun, Chengdong Zhou
Patented Case
View Patent ↗
Granted: Feb 25, 2003
Filed: Apr 3, 2001
Inventors
E. Jennings Taylor
Jenny J. Sun
Chengdong Zhou
Assignee (at issue)
Faraday Technology Marketing Group, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.