Granted Patent
Utility
US 6,524,904 · App. 09/551,542
Method of fabricating semiconductor device
Inventors:
Mizuki Segawa, Masatoshi Arai, Toshiki Yabu, Shunsuke Kugo
Patented Case
View Patent ↗
Granted: Feb 25, 2003
Filed: Apr 18, 2000
Inventors
Mizuki Segawa
Masatoshi Arai
Toshiki Yabu
Shunsuke Kugo
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.