Granted Patent
Utility
US 6,524,911 · App. 09/731,184
Combination of BPTEOS oxide film with CMP and RTA to achieve good data retention
Inventor:
Sunil Mehta
Patented Case
View Patent ↗
Granted: Feb 25, 2003
Filed: Dec 7, 2000
Inventor
Sunil Mehta
Assignee (at issue)
Lattice Semiconductor Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.