Granted Patent
Utility
US 6,525,352 · App. 09/837,362
Method to reduce release time of micromachined devices
Inventors:
Lilac Muller, Bevan Staple
Patented Case
View Patent ↗
Granted: Feb 25, 2003
Filed: Apr 18, 2001
Inventors
Lilac Muller
Bevan Staple
Assignee (at issue)
Network Photonics, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.