Granted Patent
Utility
US 6,525,366 · App. 09/839,804
Uniform dielectric layer and method to form same
Inventor:
Trung T. Doan
Patented Case
View Patent ↗
Granted: Feb 25, 2003
Filed: Apr 19, 2001
Inventor
Trung T. Doan
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.