Granted Patent
Utility
US 6,525,818 · App. 09/500,110
Overlay alignment system using polarization schemes
Inventors:
Xiaoming Yin, Tim Wiltshire, Alfred Wong, Don Wheeler
Patented Case
View Patent ↗
Granted: Feb 25, 2003
Filed: Feb 8, 2000
Inventors
Xiaoming Yin
Tim Wiltshire
Alfred Wong
Don Wheeler
Assignees (at issue)
Infineon Technologies AG
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.