Granted Patent
Utility
US 6,527,621 · App. 09/693,152
Pad retrieval apparatus for chemical mechanical planarization
Inventor:
David G. Halley
Patented Case
View Patent ↗
Granted: Mar 4, 2003
Filed: Oct 20, 2000
Inventor
David G. Halley
Assignee (at issue)
Strasbaugh
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.