Granted Patent
Utility
US 6,527,622 · App. 10/054,059
CMP method for noble metals
Inventors:
Vlasta Brusic, Francesco M. De Rege, Kevin Moeggenborg, Isaac K. Cherian, Renjie Zhou
Patented Case
View Patent ↗
Granted: Mar 4, 2003
Filed: Jan 22, 2002
Inventors
Vlasta Brusic
Francesco M. De Rege
Kevin Moeggenborg
Isaac K. Cherian
Renjie Zhou
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.