Granted Patent
Utility
US 6,528,008 · App. 09/218,934
Process for producing membrane for capacitive vacuum measuring cell
Inventor:
Per Bjoerkman
Patented Case
View Patent ↗
Granted: Mar 4, 2003
Filed: Dec 22, 1998
Inventor
Per Bjoerkman
Assignee (at issue)
INFICON GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.