Granted Patent
Utility
US 6,529,262 · App. 09/547,743
System and method for performing lithography on a substrate
Inventors:
Wenhui Mei, Takashi Kanatake
Patented Case
View Patent ↗
Granted: Mar 4, 2003
Filed: Apr 12, 2000
Inventors
Wenhui Mei
Takashi Kanatake
Assignee (at issue)
Ball Semiconductor Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.