Granted Patent
Utility
US 6,529,321 · App. 09/731,938
Protective overcoat for replicated diffraction gratings
Inventors:
Xiaojiang Pan, Richard G. Morton, Alexander I. Ershov
Patented Case
View Patent ↗
Granted: Mar 4, 2003
Filed: Dec 7, 2000
Inventors
Xiaojiang Pan
Richard G. Morton
Alexander I. Ershov
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.