Granted Patent
Utility
US 6,529,531 · App. 09/597,812
Fast wavelength correction technique for a laser
Inventors:
George J. Everage, Igor V. Fomenkov, Palash P. Das, Richard L. Sandstrom, Frederick Erie, John M. Algots
Patented Case
View Patent ↗
Granted: Mar 4, 2003
Filed: Jun 19, 2000
Inventors
George J. Everage
Igor V. Fomenkov
Palash P. Das
Richard L. Sandstrom
Frederick Erie
John M. Algots
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.