IP Library › Granted Patent US 6,530,732
Granted Patent Utility
US 6,530,732 · App. 09/084,457

Single substrate load lock with offset cool module and buffer chamber

Inventors: Victor J. Theriault, Mark Ives
Patented Case View Patent ↗
Granted: Mar 11, 2003 Filed: May 26, 1998
Inventors
Victor J. Theriault
Mark Ives
Assignee (at issue)
Brooks Automation GmbH

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Quick Facts
Patent No.
US 6,530,732
App. No.
09/084,457
Filed
1998-05-26
Granted
2003-03-11
Kind
B1