Granted Patent
Utility
US 6,530,733 · App. 09/917,223
Substrate processing pallet and related substrate processing method and machine
Inventors:
Martin Klein, David Felsenthal, Piero Sferlazzo
Patented Case
View Patent ↗
Granted: Mar 11, 2003
Filed: Jul 27, 2001
Inventors
Martin Klein
David Felsenthal
Piero Sferlazzo
Assignee (at issue)
NEXX Systems Packaging, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.