Granted Patent
Utility
US 6,530,734 · App. 09/732,010
Methods and apparatus for positive wafer process status identification during semiconductor wafer processing
Inventor:
Eric A. Nering
Patented Case
View Patent ↗
Granted: Mar 11, 2003
Filed: Dec 8, 2000
Inventor
Eric A. Nering
Assignee (at issue)
Adept Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.