IP Library Granted Patent US 6,530,736
Granted Patent Utility
US 6,530,736 · App. 09/905,339

SMIF load port interface including smart port door

Inventor: Frederick T. Rosenquist
Patented Case View Patent ↗
Granted: Mar 11, 2003 Filed: Jul 13, 2001
Inventor
Frederick T. Rosenquist
Assignee (at issue)
Asyst Technologies L.L.C.

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Quick Facts
Patent No.
US 6,530,736
App. No.
09/905,339
Filed
2001-07-13
Granted
2003-03-11
Kind
B2