Granted Patent
Utility
US 6,530,997 · App. 09/543,484
Use of gaseous silicon hydrides as a reducing agent to remove re-sputtered silicon oxide
Inventors:
Steven C. Avanzino, Larry Wang
Patented Case
View Patent ↗
Granted: Mar 11, 2003
Filed: Apr 6, 2000
Inventors
Steven C. Avanzino
Larry Wang
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.