Granted Patent
Utility
US 6,531,331 · App. 10/197,202
Monolithic integration of a MOSFET with a MEMS device
Inventors:
Reid S. Bennett, Bruce L. Draper
Patented Case
View Patent ↗
Granted: Mar 11, 2003
Filed: Jul 16, 2002
Inventors
Reid S. Bennett
Bruce L. Draper
Assignee (at issue)
Sandia Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.