Granted Patent
Utility
US 6,531,377 · App. 09/904,799
Method for high aspect ratio gap fill using sequential HDP-CVD
Inventors:
Andreas Knorr, Mihel Seitz
Patented Case
View Patent ↗
Granted: Mar 11, 2003
Filed: Jul 13, 2001
Inventors
Andreas Knorr
Mihel Seitz
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.