Granted Patent
Utility
US 6,531,400 · App. 10/222,848
Process for manufacturing semiconductor integrated circuit device
Inventors:
Naofumi Ohashi, Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada, Kenji Hinode, Yoshio Homma, Seiichi Kondo
Patented Case
View Patent ↗
Granted: Mar 11, 2003
Filed: Aug 19, 2002
Inventors
Naofumi Ohashi
Junji Noguchi
Toshinori Imai
Hizuru Yamaguchi
Nobuo Owada
Kenji Hinode
Yoshio Homma
Seiichi Kondo
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.