Granted Patent
Utility
US 6,532,182 · App. 09/811,529
Semiconductor memory production system and semiconductor memory production method
Inventors:
Sumio Ogawa, Shinichi Hara
Patented Case
View Patent ↗
Granted: Mar 11, 2003
Filed: Mar 20, 2001
Inventors
Sumio Ogawa
Shinichi Hara
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.