Granted Patent
Utility
US 6,532,247 · App. 09/794,782
Laser wavelength control unit with piezoelectric driver
Inventors:
Ronald Spangler, Robert N. Jacques, George J. Everage, Stuart L. Anderson, Frederick Palenschat, Igor V. Fomenkov, Richard L. Sandstrom, William N. Partlo, John M. Algots, Daniel J. W. Brown
Patented Case
View Patent ↗
Granted: Mar 11, 2003
Filed: Feb 27, 2001
Inventors
Ronald Spangler
Robert N. Jacques
George J. Everage
Stuart L. Anderson
Frederick Palenschat
Igor V. Fomenkov
Richard L. Sandstrom
William N. Partlo
John M. Algots
Daniel J. W. Brown
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.