Granted Patent
Utility
US 6,533,531 · App. 09/222,622
Device for handling wafers in microelectronic manufacturing
Inventors:
Binh Nguyen, Alton H. Phillips
Patented Case
View Patent ↗
Granted: Mar 18, 2003
Filed: Dec 29, 1998
Inventors
Binh Nguyen
Alton H. Phillips
Assignee (at issue)
ASML US, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.