Granted Patent
Utility
US 6,533,534 · App. 09/379,742
Method for improving the rate of a plasma enhanced vacuum treatment
Inventors:
Jacques Schmitt, Paul Muralt
Patented Case
View Patent ↗
Granted: Mar 18, 2003
Filed: Aug 24, 1999
Inventors
Jacques Schmitt
Paul Muralt
Assignee (at issue)
Unaxis Balzers Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.