Granted Patent
Utility
US 6,533,832 · App. 09/105,060
Chemical mechanical polishing slurry and method for using same
Inventors:
J. Scott Steckenrider, Brian L. Mueller
Patented Case
View Patent ↗
Granted: Mar 18, 2003
Filed: Jun 26, 1998
Inventors
J. Scott Steckenrider
Brian L. Mueller
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.