Granted Patent
Utility
US 6,533,867 · App. 09/990,971
Surface sealing showerhead for vapor deposition reactor having integrated flow diverters
Inventor:
Robert Doppelhammer
Patented Case
View Patent ↗
Granted: Mar 18, 2003
Filed: Nov 20, 2001
Inventor
Robert Doppelhammer
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.