Granted Patent
Utility
US 6,533,907 · App. 09/766,463
Method of producing amorphous silicon for hard mask and waveguide applications
Inventors:
Richard E. Demaray, Jesse Shan, Kai-An Wang, Ravi Mullapudi
Patented Case
View Patent ↗
Granted: Mar 18, 2003
Filed: Jan 19, 2001
Inventors
Richard E. Demaray
Jesse Shan
Kai-An Wang
Ravi Mullapudi
Assignee (at issue)
Symmorphix, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.