Granted Patent
Utility
US 6,533,952 · App. 09/470,860
Mitigation of radiation induced surface contamination
Inventors:
Leonard E. Klebanoff, Richard H. Stulen
Patented Case
View Patent ↗
Granted: Mar 18, 2003
Filed: Dec 23, 1999
Inventors
Leonard E. Klebanoff
Richard H. Stulen
Assignee (at issue)
EUV LLC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.