Granted Patent
Utility
US 6,534,249 · App. 09/780,165
Method of making low cost integrated out-of-plane micro-device structures
Inventors:
David K. Fork, Christopher L. Chua
Patented Case
View Patent ↗
Granted: Mar 18, 2003
Filed: Feb 9, 2001
Inventors
David K. Fork
Christopher L. Chua
Assignee (at issue)
Xerox Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.