Granted Patent
Utility
US 6,534,666 · App. 10/037,739
Use of water and acidic water to purify liquid MOCVD precursors
Inventors:
Robert Sam Zorich, James Richard Thurmond, David A. Roberts
Patented Case
View Patent ↗
Granted: Mar 18, 2003
Filed: Dec 27, 2001
Inventors
Robert Sam Zorich
James Richard Thurmond
David A. Roberts
Assignee (at issue)
Air Products and Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.